000 | 00314nam a2200121Ia 4500 | ||
---|---|---|---|
008 | 220201s1976 xx 000 0 eng d | ||
041 | _aENG | ||
100 | _aJAFFE, ERWIN | ||
245 | 0 | _aSCIENCE OF PHYSICS IN LITHOGRAPHY | |
260 |
_aLONDON _bTHAMES AND HUDSON PUBLISHING COMPANY _c1976 |
||
300 | _a147 | ||
942 | _2ddc | ||
999 |
_c47411 _d47411 |