000 00314nam a2200121Ia 4500
008 220201s1976 xx 000 0 eng d
041 _aENG
100 _aJAFFE, ERWIN
245 0 _aSCIENCE OF PHYSICS IN LITHOGRAPHY
260 _aLONDON
_bTHAMES AND HUDSON PUBLISHING COMPANY
_c1976
300 _a147
942 _2ddc
999 _c47411
_d47411