000 00299nam a2200121Ia 4500
008 220201s1998 xx 000 0 eng d
082 _a533.5
_bHOF
100 _aHoffman, D M
245 0 _aHandbook of vaccum science & tech.
260 _aDelhi
_bAcademic Press
_c1998
300 _a835
942 _2ddc
999 _c36731
_d36731