000 00292nam a2200121Ia 4500
008 220201s1998 xx 000 0 eng d
082 _a621.38173
_bRUS
100 _aRuskha, W.S.
245 0 _aMicroelectronic processing
260 _aDelhi
_bMcgraw Hill
_c1998
300 _a430
942 _2ddc
999 _c36095
_d36095